文章來(lai)源：中國冶金科工集團有(you)限公(gong)司 發布時間(jian)：2012-12-08
12月4日，中國中冶所屬中國五冶集團有限公司承建的國內首條第5.5代低溫多晶硅TFT-LCD生產線廈門天馬微電子一標段M1主廠房工程中高大模板支撐架搭設已通過驗收。目前，近3萬立方米的華夫板混凝土陸續開始澆筑，標志著該項高級別潔凈制造廠房工程進入首戰關鍵期。
該項目位于廈門市火炬高新技術產業開發區，是國內第一條也是全球第二條第5.5代低溫多晶硅薄膜晶體管晶體管液晶顯示器生產線。該項目廠房為高級別潔凈制造廠房，其最高潔凈度要求達到100級。潔凈技術為一門新興技術，在科學實驗和工業生產活動中，產品加工的精密化及微型化要求具有一個受控塵埃粒子污染的生產環境——潔凈室。
據了(le)解，在(zai)該(gai)工(gong)(gong)(gong)(gong)程(cheng)的(de)(de)主體(ti)結(jie)構中，二樓潔凈室是(shi)其(qi)最主要(yao)的(de)(de)部(bu)分，將采用華(hua)(hua)夫(fu)樓板(ban)(ban)，對結(jie)構采取(qu)減震及回(hui)風(feng)的(de)(de)作用以(yi)保(bao)證(zheng)(zheng)精密(mi)生產線的(de)(de)加工(gong)(gong)(gong)(gong)。華(hua)(hua)夫(fu)模(mo)板(ban)(ban)是(shi)一種新型復合材(cai)料(liao)，是(shi)保(bao)證(zheng)(zheng)潔凈度的(de)(de)前提。華(hua)(hua)夫(fu)樓板(ban)(ban)施(shi)(shi)(shi)工(gong)(gong)(gong)(gong)技術要(yao)求高(gao)，而該(gai)工(gong)(gong)(gong)(gong)程(cheng)的(de)(de)華(hua)(hua)夫(fu)樓板(ban)(ban)施(shi)(shi)(shi)工(gong)(gong)(gong)(gong)面積達51000平方米，如此大面積的(de)(de)微電子工(gong)(gong)(gong)(gong)程(cheng)華(hua)(hua)夫(fu)樓板(ban)(ban)施(shi)(shi)(shi)工(gong)(gong)(gong)(gong)在(zai)國(guo)內尚沒有廣(guang)泛(fan)的(de)(de)施(shi)(shi)(shi)工(gong)(gong)(gong)(gong)經驗可借鑒。中國(guo)五冶(ye)集團廈門天馬項目(mu)部(bu)在(zai)通過實踐探索模(mo)板(ban)(ban)排版、支(zhi)撐架搭設及模(mo)板(ban)(ban)安裝、華(hua)(hua)夫(fu)板(ban)(ban)模(mo)板(ban)(ban)安裝、密(mi)肋(lei)梁(liang)鋼筋綁(bang)扎、混凝土澆筑(zhu)、支(zhi)撐架及模(mo)板(ban)(ban)拆除、華(hua)(hua)夫(fu)板(ban)(ban)清潔等工(gong)(gong)(gong)(gong)序，總結(jie)該(gai)課題的(de)(de)施(shi)(shi)(shi)工(gong)(gong)(gong)(gong)工(gong)(gong)(gong)(gong)藝(yi)方法(fa)，嚴把施(shi)(shi)(shi)工(gong)(gong)(gong)(gong)質(zhi)量(liang)關(guan)，保(bao)證(zheng)(zheng)項目(mu)順利(li)推進。